Substrate

Silicon substrate is essentially pure silicon, perhaps with some dopants added to alter its conducting properties. But, it’s a semiconductor. The oxide layer is silicon dioxide, which is a ceramic, so has no electrical conductivity.
Silicone substrate can be doped by adding other atoms to affect its conductivity. Silocon Dioxide is not affected [...]

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Oxidation of silicon substrates is a comparatively straightforward procedure due to the affinity of silicon for its native oxide and there are already well developed CMOS process flows which make very high quality gate oxide. …

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